دورية أكاديمية
Electron transport across ultrathin ferroelectric Hf0.5Zr0.5O2 films on Si
العنوان: | Electron transport across ultrathin ferroelectric Hf0.5Zr0.5O2 films on Si |
---|---|
المؤلفون: | Chouprik, A., Chernikova, A., Markeev, A., Mikheev, V., Negrov, D., Spiridonov, M., Zarubin, S., Zenkevich, A. |
المصدر: | In Microelectronic Engineering 25 June 2017 178:250-253 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 01679317 |
---|---|
DOI: | 10.1016/j.mee.2017.05.028 |