دورية أكاديمية
Portable UV nanoimprint lithography system using hydraulic pressure
| العنوان: | Portable UV nanoimprint lithography system using hydraulic pressure |
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| المؤلفون: | Kang, Hojung, Choi, Eunseo, Park, Jaemin, Sung, Young Hoon, Kim, Kwan, Ju, Sucheol, Lee, Heon |
| المصدر: | In Microelectronic Engineering 15 July 2021 247 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01679317 |
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| DOI: | 10.1016/j.mee.2021.111587 |