دورية أكاديمية
Bevel contamination management in 3D integration by localized SiO2 deposition
العنوان: | Bevel contamination management in 3D integration by localized SiO2 deposition |
---|---|
المؤلفون: | Boulard, F., Gros, V., Porzier, C., Brunet, L., Lapras, V., Fournel, F., Truffier-Boutry, D., Autillo, D., Ruault, P., Keovisai, M., Posseme, N. |
المصدر: | In Microelectronic Engineering 15 September 2022 265 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 01679317 |
---|---|
DOI: | 10.1016/j.mee.2022.111875 |