دورية أكاديمية
Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film
| العنوان: | Comparison of PMMA shrinkage in ion beam lithography: PMMA on glass substrate vs free-standing PMMA film |
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| المؤلفون: | Romanenko, Oleksandr, Lavrentiev, Vasily, Borodkin, Andrei, Havranek, Vladimir, Mackova, Anna |
| المصدر: | In Nuclear Inst. and Methods in Physics Research, B May 2023 538:123-130 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 0168583X |
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| DOI: | 10.1016/j.nimb.2023.02.001 |