دورية أكاديمية
Design of an apertureless two-stage acceleration lens for a single-ion implantation system
العنوان: | Design of an apertureless two-stage acceleration lens for a single-ion implantation system |
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المؤلفون: | Ishii, Y., Ohkubo, T., Miyawaki, N., Yuri, Y., Onoda, S., Narumi, K., Saitoh, Y. |
المصدر: | In Nuclear Inst. and Methods in Physics Research, B August 2023 541:200-204 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 0168583X |
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DOI: | 10.1016/j.nimb.2023.05.021 |