دورية أكاديمية
Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon
| العنوان: | Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon |
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| المؤلفون: | Liao, C., Fretwurst, E., Garutti, E., Schwandt, J., Makarenko, L., Pintilie, I., Filip, Lucian D., Himmerlich, A., Moll, M., Gurimskaya, Y., Li, Z. |
| المصدر: | In Nuclear Inst. and Methods in Physics Research, A November 2023 1056 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01689002 |
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| DOI: | 10.1016/j.nima.2023.168559 |