دورية أكاديمية
Phosphorous degassing from poly silicon under thermal exposure: A ToF-SIMS depth profile investigation
| العنوان: | Phosphorous degassing from poly silicon under thermal exposure: A ToF-SIMS depth profile investigation |
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| المؤلفون: | Alberici, S.G., Piagge, R. |
| المصدر: | In Applied Surface Science 2006 252(19):7272-7274 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
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| DOI: | 10.1016/j.apsusc.2006.02.112 |