دورية أكاديمية
In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film
| العنوان: | In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film |
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| المؤلفون: | Lee, Seung Hyun, Park, Joong Keun |
| المصدر: | In Applied Surface Science 2007 253(23):9112-9115 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
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| DOI: | 10.1016/j.apsusc.2007.05.033 |