دورية أكاديمية
Micromachining of semiconductor by femtosecond laser for integrated circuit defect analysis
| العنوان: | Micromachining of semiconductor by femtosecond laser for integrated circuit defect analysis |
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| المؤلفون: | Halbwax, M., Sarnet, T., Hermann, J., Delaporte, Ph., Sentis, M., Fares, L., Haller, G. |
| المصدر: | In Applied Surface Science 2007 254(4):911-915 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
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| DOI: | 10.1016/j.apsusc.2007.07.202 |