دورية أكاديمية
Impact of incorporated oxygen quantity on optical, structural and dielectric properties of reactive magnetron sputter grown high-κ HfO2/Hf/Si thin film
| العنوان: | Impact of incorporated oxygen quantity on optical, structural and dielectric properties of reactive magnetron sputter grown high-κ HfO2/Hf/Si thin film |
|---|---|
| المؤلفون: | Cantas, A., Aygun, G., Turan, R. |
| المصدر: | In Applied Surface Science 1 November 2014 318:199-205 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
|---|---|
| DOI: | 10.1016/j.apsusc.2014.03.077 |