دورية أكاديمية
Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4
| العنوان: | Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4 |
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| المؤلفون: | Wolf, Steven, Breeden, Michael, Kwak, Iljo, Park, Jun H., Kavrik, Mahmut, Naik, Mehul, Alvarez, Daniel, Spiegelman, Jeffrey, Kummel, Andrew C. |
| المصدر: | In Applied Surface Science 31 December 2018 462:1029-1035 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
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| DOI: | 10.1016/j.apsusc.2018.07.153 |