دورية أكاديمية
Substrate temperature effects on PEALD HfAlO dielectric films for IGZO-TFT applications
| العنوان: | Substrate temperature effects on PEALD HfAlO dielectric films for IGZO-TFT applications |
|---|---|
| المؤلفون: | Chen, Han-Bin, Hsu, Chia-Hsun, Wu, Wan-Yu, Zhang, Wen-Zhi, Zhang, Jing, Zhang, Xiao-Ying, Gao, Peng, Wuu, Dong-Sing, Lai, Feng-Min, Lien, Shui-Yang, Zhu, Wen-Zhang |
| المصدر: | In Applied Surface Science 30 August 2024 665 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 01694332 |
|---|---|
| DOI: | 10.1016/j.apsusc.2024.160305 |