دورية أكاديمية
Influence of a short reverse positive HPPMS pulse on the deposition of CrAlN
العنوان: | Influence of a short reverse positive HPPMS pulse on the deposition of CrAlN |
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المؤلفون: | Bobzin, K., Brögelmann, T., Kruppe, N.C., Eichenhofer, G., Schulze, C. |
المصدر: | In Surface & Coatings Technology 15 October 2021 423 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 02578972 |
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DOI: | 10.1016/j.surfcoat.2021.127625 |