دورية أكاديمية

From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films

التفاصيل البيبلوغرافية
العنوان: From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films
المؤلفون: Hain, Caroline, Brown, David, Welsh, Alexander, Wieczerzak, Krzysztof, Weiss, Robert, Michler, Johann, Hessler-Wyser, Aïcha, Nelis, Thomas
المصدر: In Surface & Coatings Technology 25 February 2022 432
قاعدة البيانات: ScienceDirect
الوصف
تدمد:02578972
DOI:10.1016/j.surfcoat.2021.127928