دورية أكاديمية
From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films
العنوان: | From pulsed-DCMS and HiPIMS to microwave plasma-assisted sputtering: Their influence on the properties of diamond-like carbon films |
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المؤلفون: | Hain, Caroline, Brown, David, Welsh, Alexander, Wieczerzak, Krzysztof, Weiss, Robert, Michler, Johann, Hessler-Wyser, Aïcha, Nelis, Thomas |
المصدر: | In Surface & Coatings Technology 25 February 2022 432 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 02578972 |
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DOI: | 10.1016/j.surfcoat.2021.127928 |