دورية أكاديمية
Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation
| العنوان: | Microwave plasma-assisted reactive HiPIMS of InN films: Plasma environment and material characterisation |
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| المؤلفون: | Hain, Caroline, Schweizer, Peter, Sturm, Patrick, Borzì, Aurelio, Thomet, Jonathan E., Michler, Johann, Hessler-Wyser, Aïcha, Nelis, Thomas |
| المصدر: | In Surface & Coatings Technology 15 February 2023 454 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02578972 |
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| DOI: | 10.1016/j.surfcoat.2022.129188 |