دورية أكاديمية
Effect of substrate temperature on growth mechanism and properties of PEALD-MgO dielectric films for amorphous-IGZO TFTs
| العنوان: | Effect of substrate temperature on growth mechanism and properties of PEALD-MgO dielectric films for amorphous-IGZO TFTs |
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| المؤلفون: | Su, Zhan-Bo, Zhang, Xiao-Ying, Lin, Xiao, Li, Xiao-Long, Quan, Cheng-Xiang, Hsu, Chia-Hsun, Gao, Peng, Wu, Wan-Yu, Wuu, Dong-Sing, Lai, Feng-Min, Lien, Shui-Yang |
| المصدر: | In Surface & Coatings Technology 15 May 2024 483 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02578972 |
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| DOI: | 10.1016/j.surfcoat.2024.130819 |