دورية أكاديمية
Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations
| العنوان: | Nanocolumnar TiN thin film growth by oblique angle sputter-deposition: Experiments vs. simulations |
|---|---|
| المؤلفون: | Bouaouina, Boudjemaa, Mastail, Cédric, Besnard, Aurélien, Mareus, Rubenson, Nita, Florin, Michel, Anny, Abadias, Grégory |
| المصدر: | In Materials & Design 15 December 2018 160:338-349 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02641275 |
|---|---|
| DOI: | 10.1016/j.matdes.2018.09.023 |