دورية أكاديمية
Investigation of wet etching technique for selective patterning of ferroelectric zirconium-doped hafnium oxide thin films for high-frequency electronic applications
| العنوان: | Investigation of wet etching technique for selective patterning of ferroelectric zirconium-doped hafnium oxide thin films for high-frequency electronic applications |
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| المؤلفون: | Dinu, Livia Alexandra, Romanitan, Cosmin, Aldrigo, Martino, Parvulescu, Catalin, Nastase, Florin, Vulpe, Silviu, Gavrila, Raluca, Varasteanu, Pericle, Serban, Andreea Bianca, Noumi, Rihem, Ishchenko, Olga M. |
| المصدر: | In Materials & Design September 2023 233 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02641275 |
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| DOI: | 10.1016/j.matdes.2023.112194 |