دورية أكاديمية
Synergistic effect of abrasive friction and glycine on improving chemical mechanical polishing performance of single-crystal GaN substrate
| العنوان: | Synergistic effect of abrasive friction and glycine on improving chemical mechanical polishing performance of single-crystal GaN substrate |
|---|---|
| المؤلفون: | Ke, Congming, Liu, Shoulin, Pang, Yiao, Wei, Yongping, Wu, Yaping, Luo, Qiufa, Wu, Yueqin, Lu, Jing |
| المصدر: | In Ceramics International 15 June 2024 50(12):21357-21366 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 02728842 |
|---|---|
| DOI: | 10.1016/j.ceramint.2024.03.247 |