دورية أكاديمية
Low temperature (002)-oriented zinc oxide films prepared using ozone-based spatial atomic layer deposition
العنوان: | Low temperature (002)-oriented zinc oxide films prepared using ozone-based spatial atomic layer deposition |
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المؤلفون: | Wu, Wen-Bin, Hsu, Chia-Hsun, Yue, Xin-Xiang, Zhang, Wen-Zhi, Zhang, Jing, Zhang, Xiao-Ying, Gao, Peng, Wu, Wan-Yu, Wuu, Dong-Sing, Lai, Feng-Min, Lien, Shui-Yang |
المصدر: | In Ceramics International 1 August 2024 50(15):26770-26779 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 02728842 |
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DOI: | 10.1016/j.ceramint.2024.04.404 |