دورية أكاديمية
Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron
العنوان: | Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron |
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المؤلفون: | Wu, Min, Huang, Hui, Wu, Yueqin, Xu, Zhiteng, Li, Tukun, Macleod, Iain, Wu, Xiaolei |
المصدر: | In Tribology International May 2024 193 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 0301679X |
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DOI: | 10.1016/j.triboint.2024.109450 |