دورية أكاديمية
Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron
| العنوان: | Mechanism of friction-induced chemical reaction high-efficient polishing single crystal 4H-SiC wafer using pure iron |
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| المؤلفون: | Wu, Min, Huang, Hui, Wu, Yueqin, Xu, Zhiteng, Li, Tukun, Macleod, Iain, Wu, Xiaolei |
| المصدر: | In Tribology International May 2024 193 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 0301679X |
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| DOI: | 10.1016/j.triboint.2024.109450 |