دورية أكاديمية
A concise subspace projection based meta-learning method for fast modeling and monitoring in multi-grade semiconductor process
| العنوان: | A concise subspace projection based meta-learning method for fast modeling and monitoring in multi-grade semiconductor process |
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| المؤلفون: | Liu, Jingxiang, Zhu, Weimin, Mu, Guoqing, Chen, Chun-I, Chen, Junghui |
| المصدر: | In Computers & Industrial Engineering February 2024 188 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 03608352 |
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| DOI: | 10.1016/j.cie.2024.109914 |