دورية أكاديمية
Characterization of film materials in wafer processing technology development by XPS
| العنوان: | Characterization of film materials in wafer processing technology development by XPS |
|---|---|
| المؤلفون: | Saheli, Ghazal, Liu, Wei, Lazik, Christopher, Uritsky, Yuri, Bevan, Malcolm, Tang, Wei, Ma, Paul, Venkatasubramanian, Eswaranand, Bobek, Sarah, Kulshreshtha, Prashant, Brundle, C.R. |
| المصدر: | In Journal of Electron Spectroscopy and Related Phenomena February 2019 231:57-67 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 03682048 |
|---|---|
| DOI: | 10.1016/j.elspec.2018.03.007 |