دورية أكاديمية
Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride
| العنوان: | Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride |
|---|---|
| المؤلفون: | Nasrollahi, Vahid *, Penchev, Pavel, Batal, Afif, Le, Hoang, Dimov, Stefan, Kim, Kyunghan |
| المصدر: | In Journal of Materials Processing Tech. July 2020 281 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 09240136 |
|---|---|
| DOI: | 10.1016/j.jmatprotec.2020.116636 |