دورية أكاديمية
A high-resolution area-change-based capacitive MEMS tilt sensor
العنوان: | A high-resolution area-change-based capacitive MEMS tilt sensor |
---|---|
المؤلفون: | Rao, Kang, Liu, Huafeng, Wei, Xiaoli, Wu, Wenjie, Hu, Chenyuan, Fan, Ji, Liu, Jinquan, Tu, Liangcheng |
المصدر: | In Sensors and Actuators: A. Physical 1 October 2020 313 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 09244247 |
---|---|
DOI: | 10.1016/j.sna.2020.112191 |