دورية أكاديمية
A high-resolution area-change-based capacitive MEMS tilt sensor
| العنوان: | A high-resolution area-change-based capacitive MEMS tilt sensor |
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| المؤلفون: | Rao, Kang, Liu, Huafeng, Wei, Xiaoli, Wu, Wenjie, Hu, Chenyuan, Fan, Ji, Liu, Jinquan, Tu, Liangcheng |
| المصدر: | In Sensors and Actuators: A. Physical 1 October 2020 313 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 09244247 |
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| DOI: | 10.1016/j.sna.2020.112191 |