دورية أكاديمية
A time division capacitive feedback method of electrostatic MEMS mirror driven by PWM signal
| العنوان: | A time division capacitive feedback method of electrostatic MEMS mirror driven by PWM signal |
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| المؤلفون: | Xia, Changfeng, Qiao, Dayong, Song, Xudong, Song, Xiumin, Zheng, Wenhui, He, Yaojun, Wu, Banghua |
| المصدر: | In Sensors and Actuators: A. Physical 1 May 2021 322 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 09244247 |
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| DOI: | 10.1016/j.sna.2021.112631 |