دورية أكاديمية

Uncertainty quantification with high-dimensional correlated process variations for an in-situ thermal expansion coefficient test structure

التفاصيل البيبلوغرافية
العنوان: Uncertainty quantification with high-dimensional correlated process variations for an in-situ thermal expansion coefficient test structure
المؤلفون: Zhao, Lin-Feng, Zhou, Zai-Fa, Huang, Qing-An
المصدر: In Sensors and Actuators: A. Physical 1 June 2024 371
قاعدة البيانات: ScienceDirect
الوصف
تدمد:09244247
DOI:10.1016/j.sna.2024.115281