دورية أكاديمية
KNN lead-free technology on 200 mm Si wafer for piezoelectric actuator applications
العنوان: | KNN lead-free technology on 200 mm Si wafer for piezoelectric actuator applications |
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المؤلفون: | Kuentz, Hugo, Dieppedale, Christel, Mollard, Laurent, Liechti, Romain, Campo, Alain, Hamelin, Antoine, Demange, Valérie, Poulain, Christophe, Guilloux-Viry, Maryline, Le Rhun, Gwenaël |
المصدر: | In Sensors and Actuators: A. Physical 1 July 2024 372 |
قاعدة البيانات: | ScienceDirect |
تدمد: | 09244247 |
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DOI: | 10.1016/j.sna.2024.115370 |