دورية أكاديمية
Silicon–glass wafer bonding with silicon hydrophilic fusion bonding technology
| العنوان: | Silicon–glass wafer bonding with silicon hydrophilic fusion bonding technology |
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| المؤلفون: | Xiao, Zhi-Xiong *, Wu, Guo-Ying, Li, Zhi-Hong, Zhang, Guo-Bing, Hao, Yi-Long, Wang, Yang-Yuan |
| المصدر: | In Sensors & Actuators: A. Physical 1999 72(1):46-48 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 09244247 |
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| DOI: | 10.1016/S0924-4247(98)00197-6 |