دورية أكاديمية
The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma
| العنوان: | The subimplantation model for hydrogenated amorphous carbon films deposited in electron cyclotron resonance plasma |
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| المؤلفون: | Durand-Drouhin, O., Lejeune, M., Bouzerar, R., Benlahsen, M. * |
| المصدر: | In Materials Science in Semiconductor Processing 6 February 2001 4(1-3):213-215 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 13698001 |
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| DOI: | 10.1016/S1369-8001(00)00097-4 |