دورية أكاديمية
Optimization of electric properties of high- k zirconium dioxide by varying deposition and annealing conditions
| العنوان: | Optimization of electric properties of high- k zirconium dioxide by varying deposition and annealing conditions |
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| المؤلفون: | Silinskas, M., Lisker, M., Matichyn, S., Kalkofen, B., Burte, E.P. |
| المصدر: | In Materials Science in Semiconductor Processing 2006 9(6):1037-1042 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 13698001 |
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| DOI: | 10.1016/j.mssp.2006.10.038 |