دورية أكاديمية
Secondary defects of as-grown oxygen precipitates in nitrogen doped Czochralski single crystal silicon
| العنوان: | Secondary defects of as-grown oxygen precipitates in nitrogen doped Czochralski single crystal silicon |
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| المؤلفون: | Tuo, Huan, Liu, Yun, Li, Minghao, Dai, Rongwang, Wang, Hao, Yu, Yuehui, Xue, Zhongying, Wei, Xing |
| المصدر: | In Materials Science in Semiconductor Processing 15 August 2023 163 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 13698001 |
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| DOI: | 10.1016/j.mssp.2023.107583 |