دورية أكاديمية
Impact of flows, temperature and pressure on the GeSn growth kinetics with a digermane and tin tetrachloride chemistry
| العنوان: | Impact of flows, temperature and pressure on the GeSn growth kinetics with a digermane and tin tetrachloride chemistry |
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| المؤلفون: | Hartmann, J.M., Marion, T. |
| المصدر: | In Materials Science in Semiconductor Processing January 2024 169 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 13698001 |
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| DOI: | 10.1016/j.mssp.2023.107893 |