دورية أكاديمية
Machined quality prediction and optimization for micro-EDM drilling of semi-conductive SiC wafer
| العنوان: | Machined quality prediction and optimization for micro-EDM drilling of semi-conductive SiC wafer |
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| المؤلفون: | Cao, Hoang-Tien, Ho, Jeng-Rong, Tung, Pi-Cheng, Lin, Yuan-Ting, Lin, Chih-Kuang |
| المصدر: | In Materials Science in Semiconductor Processing January 2024 169 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 13698001 |
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| DOI: | 10.1016/j.mssp.2023.107911 |