دورية أكاديمية
Comprehensive investigation of Er2O3 thin films grown with different ALD approaches
| العنوان: | Comprehensive investigation of Er2O3 thin films grown with different ALD approaches |
|---|---|
| المؤلفون: | Khomenkova, L., Merabet, H., Chauvat, M.-P., Frilay, C., Portier, X., Labbe, C., Marie, P., Cardin, J., Boudin, S., Rueff, J.-M., Gourbilleau, F. |
| المصدر: | In Surfaces and Interfaces November 2022 34 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 24680230 |
|---|---|
| DOI: | 10.1016/j.surfin.2022.102377 |