دورية أكاديمية
Tackling residual tensile stress in AlN-on-Si nucleation layers via the controlled Si(111) surface nitridation
| العنوان: | Tackling residual tensile stress in AlN-on-Si nucleation layers via the controlled Si(111) surface nitridation |
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| المؤلفون: | Milakhin, Denis, Malin, Timur, Mansurov, Vladimir, Maidebura, Yan, Bashkatov, Dmitriy, Milekhin, Ilya, Goryainov, Sergey, Volodin, Vladimir, Loshkarev, Ivan, Vdovin, Vladimir, Gutakovskii, Anton, Ponomarev, Sergei, Zhuravlev, Konstantin |
| المصدر: | In Surfaces and Interfaces August 2024 51 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 24680230 |
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| DOI: | 10.1016/j.surfin.2024.104817 |