دورية أكاديمية
Low-temperature ALD of highly conductive antimony films through the reaction of silylamide with alkoxide and alkylamide precursors
| العنوان: | Low-temperature ALD of highly conductive antimony films through the reaction of silylamide with alkoxide and alkylamide precursors |
|---|---|
| المؤلفون: | He, S., Bahrami, A., Zhang, X., Julin, J., Laitinen, M., Nielsch, K. |
| المصدر: | In Materials Today Chemistry August 2023 32 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 24685194 |
|---|---|
| DOI: | 10.1016/j.mtchem.2023.101650 |