دورية أكاديمية
Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions
| العنوان: | Studying the efficacy of hydrogen plasma treatment for enabling the etching of thermally annealed ruthenium in chemical solutions |
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| المؤلفون: | Le, Q.T., Gül Arslan, E., Rip, J., De Coster, H., Verdonck, P., Radisic, D., Schleicher, F., Vaesen, I., Conard, T., Altamirano-Sanchez, E. |
| المصدر: | In Micro and Nano Engineering June 2023 19 |
| قاعدة البيانات: | ScienceDirect |
Full Text Finder | تدمد: | 25900072 |
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| DOI: | 10.1016/j.mne.2023.100208 |