رسالة جامعية
Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography
| العنوان: | Design and fabrication of hidden hinge monocrystalline silicon micromirrors for maskless lithography |
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| المؤلفون: | Bring, Martin |
| Degree: | Diss. (sammanfattning) Göteborg : Chalmers tekniska högskola, 2008 |
| قاعدة البيانات: | Swedish National Bibliography |
| ردمك: | 9789173850728 |
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