مورد إلكتروني
Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics
| العنوان: | Binary pseudo-random array standards for calibration of 3D optical surface profilers used for metrology with aspheric x-ray optics |
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| المؤلفون: | Munechika, K |
| بيانات النشر: | eScholarship, University of California 2022-01-01 |
| تفاصيل مُضافة: | North-Morris, Michael B1 Creath, Katherine Porras-Aguilar, Rosario Munechika, K Chao, W Dhuey, S Lacey, I Pina-Hernandez, C Rochester, S Yashchuk, VV |
| نوع الوثيقة: | Electronic Resource |
| مستخلص: | High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The current capabilities and possibility for improvements in x-ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. Metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for fabrication of slightly curved x-ray optics. However, for even moderately curved aspherical x-ray mirrors the flat-reference calibration is not sufficiently accurate. In the case of micro-stitching interferometry developed for surface measurements with curved xray mirrors, the tool aberration errors are known to be transferred into the optical surface topography of x-ray mirrors. Our approach to improvement of the metrology is to thoroughly calibrate the measuring tool and apply the results of the calibration to gain the reliability of the metrology via calibration-based deconvolution of the measured data. Thus, we explore the application of a recently developed technique for calibrating the instrument's transfer function (ITF) of 3D optical surface profilers to the metrology with significantly curved x-ray optics. The technique, based on test standards structured as two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic whitenoise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. The high efficacy of the technique has been previously demonstrated in application to metrology with flat and slightly curved optics. Here, we concentrate on development of an efficient fabrication process for production of highly randomized (HR) BPRA test standards on flat |
| مصطلحات الفهرس: | publication |
| URL: | |
| الإتاحة: | Open access content. Open access content public |
| ملاحظة: | application/pdf |
| أرقام أخرى: | CDLER oai:escholarship.org:ark:/13030/qt17x0v1g1 qt17x0v1g1 https://escholarship.org/uc/item/17x0v1g1 https://escholarship.org/ 1377981265 |
| المصدر المساهم: | UC MASS DIGITIZATION From OAIster®, provided by the OCLC Cooperative. |
| رقم الأكسشن: | edsoai.on1377981265 |
| قاعدة البيانات: | OAIster |
| الوصف غير متاح. |