التفاصيل البيبلوغرافية
| العنوان: |
Universal selective transfer printing via micro-vacuum force |
| المؤلفون: |
Sang Hyun Park, Tae Jin Kim, Han Eol Lee, Boo Soo Ma, Myoung Song, Min Seo Kim, Jung Ho Shin, Seung Hyung Lee, Jae Hee Lee, Young Bin Kim, Ki Yun Nam, Hong-Jin Park, Taek-Soo Kim, Keon Ja |
| المصدر: |
Nature, Nature Communications. 14(1):1-11 |
| سنة النشر: |
2023 |
| الوصف: |
Transfer printing of inorganic thin-film semiconductors has attracted considerable attention to realize high-performance soft electronics on unusual substrates. However, conventional transfer technologies including elastomeric transfer printing, laser-assisted transfer, and electrostatic transfer still have challenging issues such as stamp reusability, additional adhesives, and device damage. Here, a micro-vacuum assisted selective transfer is reported to assemble micro-sized inorganic semiconductors onto unconventional substrates. 20 μm-sized micro-hole arrays are formed via laser-induced etching technology on a glass substrate. The vacuum controllable module, consisting of a laser-drilled glass and hard-polydimethylsiloxane micro-channels, enables selective modulation of micro-vacuum suction force on microchip arrays. Ultrahigh adhesion switchability of 3.364 × 106, accomplished by pressure control during the micro-vacuum transfer procedure, facilitates the pick-up and release of thin-film semiconductors without additional adhesives and chip damage. Heterogeneous integration of III-V materials and silicon is demonstrated by assembling microchips with diverse shapes and sizes from different mother wafers on the same plane. Multiple selective transfers are implemented by independent pressure control of two separate vacuum channels with a high transfer yield of 98.06%. Finally, flexible micro light-emitting diodes and transistors with uniform electrical/optical properties are fabricated via micro-vacuum assisted selective transfer. |
| نوع الوثيقة: |
redif-article |
| اللغة: |
English |
| DOI: |
10.1038/s41467-023-43342 |
| الإتاحة: |
https://ideas.repec.org/a/nat/natcom/v14y2023i1d10.1038_s41467-023-43342-8.html |
| رقم الأكسشن: |
edsrep.a.nat.natcom.v14y2023i1d10.1038.s41467.023.43342.8 |
| قاعدة البيانات: |
RePEc |
