كتاب إلكتروني
Optical Characterization of RF Inductively Coupled Plasmas
| العنوان: | Optical Characterization of RF Inductively Coupled Plasmas |
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| المؤلفون: | Wendt, A. E.Aff3, Aff4, Beale, D. F.Aff5, Hitchon, W. N. G.Aff3, Aff4, Keiter, E.Aff4, Kolobov, V.Aff4, Mahoney, L.Aff5, Pierre, A. A.Aff4, Stittsworth, J.Aff6 |
| المساهمون: | Kortshagen, Uwe, editorAff1, Tsendin, Lev D., editorAff2 |
| المصدر: | Electron Kinetics and Applications of Glow Discharges. 367:489-502 |
| قاعدة البيانات: | Springer Nature eBooks |
Full Text Finder | ردمك: | 9780306458224 9780306470769 |
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| DOI: | 10.1007/0-306-47076-4_29 |