كتاب إلكتروني
Nano - Precision Systems for Overlay in Advanced Lithography Processes
| العنوان: | Nano - Precision Systems for Overlay in Advanced Lithography Processes |
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| المؤلفون: | Ajay, P.Aff5, Sreenivasan, S. V.Aff5 |
| المساهمون: | Monostori, Laszlo, editorAff1, Majstorovic, Vidosav D., editorAff2, Hu, S. Jack, editorAff3, Djurdjanovic, Dragan, editorAff4 |
| المصدر: | Proceedings of the 4th International Conference on the Industry 4.0 Model for Advanced Manufacturing : AMP 2019. :1-11 |
| قاعدة البيانات: | Springer Nature eBooks |
| ردمك: | 9783030181796 9783030181802 |
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| DOI: | 10.1007/978-3-030-18180-2_1 |