كتاب إلكتروني
Fabrication of an Electrostatic Lens Array with Separate Electrodes and Shield Membranes Using the UV-Liga Process
العنوان: | Fabrication of an Electrostatic Lens Array with Separate Electrodes and Shield Membranes Using the UV-Liga Process |
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المؤلفون: | Ono, HaruhitoAff2, Nagae, KenichiAff2, Shimada, YasuhiroAff2, Maehara, HiroshiAff2, Yagi, TakayukiAff2, Muraki, MasatoAff3, Okunuki, MasahikoAff3 |
المساهمون: | Obermeier, Ernst, editorAff1 |
المصدر: | Transducers ’01 Eurosensors XV : The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany. :1558-1561 |
قاعدة البيانات: | Springer Nature eBooks |
ردمك: | 9783540421504 9783642594977 |
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DOI: | 10.1007/978-3-642-59497-7_368 |