كتاب إلكتروني
Nanolithography Developed Through Electron-Beam-Induced Surface Reaction
| العنوان: | Nanolithography Developed Through Electron-Beam-Induced Surface Reaction |
|---|---|
| المؤلفون: | Matsui, ShinjiAff4, Ochiai, YukinoriAff4, Baba, MasakazuAff4, Watanabe, HeijiAff4 |
| المساهمون: | Gentili, M., editorAff1, Giovannella, C., editorAff2, Selci, S., editorAff3 |
| المصدر: | NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies. 264:25-43 |
| قاعدة البيانات: | Springer Nature eBooks |
Full Text Finder | ردمك: | 9789048143887 9789401582612 |
|---|---|
| DOI: | 10.1007/978-94-015-8261-2_3 |