كتاب إلكتروني
Nanolithography Developed Through Electron-Beam-Induced Surface Reaction
العنوان: | Nanolithography Developed Through Electron-Beam-Induced Surface Reaction |
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المؤلفون: | Matsui, ShinjiAff4, Ochiai, YukinoriAff4, Baba, MasakazuAff4, Watanabe, HeijiAff4 |
المساهمون: | Gentili, M., editorAff1, Giovannella, C., editorAff2, Selci, S., editorAff3 |
المصدر: | NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies. 264:25-43 |
قاعدة البيانات: | Springer Nature eBooks |
ردمك: | 9789048143887 9789401582612 |
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DOI: | 10.1007/978-94-015-8261-2_3 |