كتاب إلكتروني
Thin Film Growth Equipment
العنوان: | Thin Film Growth Equipment |
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المؤلفون: | Xia, YangAff5, Ding, PeijunAff6, Zhao, JinrongAff6, Yin, BinAff5, Shi, XiaopingAff6 |
المساهمون: | Wang, Yangyuan, editorAff1, Chi, Min-Hwa, editorAff2, Lou, Jesse Jen-Chung, editorAff3, Chen, Chun-Zhang, editorAff4 |
المصدر: | Handbook of Integrated Circuit Industry. :1383-1439 |
قاعدة البيانات: | Springer Nature eBooks |
ردمك: | 9789819928354 9789819928361 |
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DOI: | 10.1007/978-981-99-2836-1_67 |