دورية أكاديمية
A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors
| العنوان: | A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors |
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| المؤلفون: | Liu, SongtaoAff1, Aff2, Zhang, GaofeiAff1, Aff2, Aff3, IDs41378023006198_cor2, Zhang, LingyunAff1, Aff2, Wang, Junya, Gong, MinghaoAff1, Aff2, You, ZhengAff1, Aff4 |
| المصدر: | Microsystems & Nanoengineering. 9(1) |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 20557434 |
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| DOI: | 10.1038/s41378-023-00619-8 |