دورية أكاديمية
In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method
العنوان: | In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method |
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المؤلفون: | Fossati, D., Beitia, C., Plantier, L., Imbert, G., Passefort, S., Desbois, M., Volpi, F., Royer, J.-C. |
المصدر: | Journal of Materials Science: Materials in Electronics. February 2008 19(2):115-118 |
قاعدة البيانات: | Springer Nature Journals |
تدمد: | 09574522 1573482X |
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DOI: | 10.1007/s10854-007-9328-z |