دورية أكاديمية
In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method
| العنوان: | In-line characterization of dielectric constant and leakage currents of low-k films with corona charge method |
|---|---|
| المؤلفون: | Fossati, D., Beitia, C., Plantier, L., Imbert, G., Passefort, S., Desbois, M., Volpi, F., Royer, J.-C. |
| المصدر: | Journal of Materials Science: Materials in Electronics. February 2008 19(2):115-118 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 09574522 1573482X |
|---|---|
| DOI: | 10.1007/s10854-007-9328-z |