دورية أكاديمية
Physical properties of memory quality PECVD silicon nitride
| العنوان: | Physical properties of memory quality PECVD silicon nitride |
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| المؤلفون: | Khaliq, M. A., Shams, Q. A., Brown, W. D., Naseem, H. A. |
| المصدر: | Journal of Electronic Materials. September 1988 17(5):355-359 |
| قاعدة البيانات: | Springer Nature Journals |
Find this article in full text from Springer Verlag. 
Full Text Finder | تدمد: | 03615235 1543186X |
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| DOI: | 10.1007/bf02652118 |