دورية أكاديمية

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

التفاصيل البيبلوغرافية
العنوان: Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging
المؤلفون: Han, XiangguangAff1, Aff2, Aff3, Huang, MimiAff1, Aff2, Aff3, Wu, Zutang, Gao, YiAff1, Aff2, Aff3, Xia, YongAff1, Aff2, Aff3, Yang, PingAff1, Aff2, Aff3, Fan, ShuAff1, Aff2, Aff3, Lu, XuhaoAff1, Aff2, Aff3, Yang, XiaokaiAff1, Aff2, Aff3, Liang, LinAff1, Aff2, Aff3, Su, WenbiAff1, Aff2, Aff3, Wang, LuAff1, Aff2, Aff3, Cui, ZeyuAff1, Aff2, Aff3, Zhao, YiheAff1, Aff2, Aff3, Li, ZhikangAff1, Aff2, Aff3, IDs41378023006201_cor15, Zhao, LiboAff1, Aff2, Aff3, IDs41378023006201_cor16, Jiang, ZhuangdeAff1, Aff2, Aff3
المصدر: Microsystems & Nanoengineering. 9(1)
قاعدة البيانات: Springer Nature Journals
الوصف
تدمد:20557434
DOI:10.1038/s41378-023-00620-1